MEMS is a micro-system integrated with micro-machinery (Micron/nanoscale) and IC, that is, an intelligent micro-system. MEMS is based on silicon micro-processing technology but not limited to it. In short, MEMS is the further integration of system-level chips. We can integrate almost anything on a single chip, such as motion devices, optical systems, pronunciation systems, chemical analysis, wireless systems and computing systems, etc, therefore, MEMS technology is a multidisciplinary technology. MEMS devices are cheap, excellent in performance, suitable for a variety of applications, and will become one of the important technologies affecting future life.
Microelectronic mechanical system (MEMS) technology is a cutting-edge technology in the 21st century based on micro/nanotechnology, which refers to the design, processing, manufacturing, techniques of measurement and control. It can integrate mechanical components, optical systems, driving components and electronic control systems into a miniature system of an integral unit.
